Title :
Low-dislocation-density 4" 0 Ø GaAs single crystal growth under arsenic atmosphere
Author :
Kawase, Toshihiro ; Fujiwara, Shingo ; Kimura, K. ; Tatsumi, Motoi ; Shirakawa, T. ; Tada, Kazuki
Author_Institution :
Sumitomo Electric Industries, Ltd., Japan
Keywords :
Atmosphere; Capacitive sensors; Crystals; Epitaxial layers; Gallium arsenide; Molecular beam epitaxial growth; Random access memory; Strain measurement; Substrates; Temperature;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752681