Title :
GalnAsP/l Short Cavity Laser Diodes With Facet Mirrors Etched By Chlorine Gas Reactive Ion Beam Etching
Author :
Iwase, M. ; Matsumoto, N. ; Kasukawa, A.
Author_Institution :
The Furukawa Electric Co.,Ltd.
fDate :
29 Jul-2 Aug 1991
Keywords :
Diode lasers; Etching; Ion beams; Mirrors; Power generation;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.639013
