DocumentCode :
2652599
Title :
Improved uniformity of SI-VB GaAs by annealing
Author :
Freidenreich, B.E. ; Bronsema, K.D. ; Korzeniowski, Z. ; Nykiel, B. ; Francomano, D. ; Moore ; Kremer, R.E.
Author_Institution :
Crystal Specialties International, Colorado Springs
fYear :
1992
fDate :
21-24 Apr 1992
Firstpage :
105
Lastpage :
110
Keywords :
Annealing; Conductivity; Gallium arsenide; Hall effect; Production; Semiconductor device modeling; Size control; Springs; Tail; Temperature measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
Type :
conf
DOI :
10.1109/SIM.1992.752684
Filename :
752684
Link To Document :
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