DocumentCode
2652599
Title
Improved uniformity of SI-VB GaAs by annealing
Author
Freidenreich, B.E. ; Bronsema, K.D. ; Korzeniowski, Z. ; Nykiel, B. ; Francomano, D. ; Moore ; Kremer, R.E.
Author_Institution
Crystal Specialties International, Colorado Springs
fYear
1992
fDate
21-24 Apr 1992
Firstpage
105
Lastpage
110
Keywords
Annealing; Conductivity; Gallium arsenide; Hall effect; Production; Semiconductor device modeling; Size control; Springs; Tail; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN
0-7503-0242-9
Type
conf
DOI
10.1109/SIM.1992.752684
Filename
752684
Link To Document