Title :
Improved uniformity of SI-VB GaAs by annealing
Author :
Freidenreich, B.E. ; Bronsema, K.D. ; Korzeniowski, Z. ; Nykiel, B. ; Francomano, D. ; Moore ; Kremer, R.E.
Author_Institution :
Crystal Specialties International, Colorado Springs
Keywords :
Annealing; Conductivity; Gallium arsenide; Hall effect; Production; Semiconductor device modeling; Size control; Springs; Tail; Temperature measurement;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752684