Title :
Interdigitated electrode modelling for applications in dielectrophoresis
Author :
Chung, C. ; Smith, S. ; Menachery, A. ; Bagnaninchi, P. ; Walton, A.J. ; Pethig, R.
Author_Institution :
Inst. for Integrated Micro & Nano Syst., Univ. of Edinburgh, Edinburgh, UK
Abstract :
Electrical test structures have been designed to enable the characterisation of interdigitated electrode structures in conductive solutions, as used in dielectrophoresis. Test masks have been fabricated to explore the impact of array size, finger separation and solution conductivity on the applied electric field. A circuit model based on a distributed RC network is proposed and evaluated, demonstrating close agreement with actual impedance measurements. This provides the capability to readily predict the voltage and phase along the length of electrodes used for dielectrophoresis and other applications.
Keywords :
RC circuits; electric impedance measurement; electrodes; electrophoresis; integrated circuit modelling; actual impedance measurements; applied electric field; array size; circuit model; conductive solutions; dielectrophoresis; distributed RC network; electrical test structures; finger separation; interdigitated electrode modelling; interdigitated electrode structures; solution conductivity; test masks; Conductivity; Electrodes; Fingers; Frequency measurement; Impedance; Impedance measurement; Resistance;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4244-8526-0
Electronic_ISBN :
1071-9032
DOI :
10.1109/ICMTS.2011.5976863
