Title :
Hydride vapour phase epitaxial regrowth of SI-InP: Fe on non-planar surfaces for device fabrication
Author :
Lourdudoss, S. ; Kjebon, O.
Author_Institution :
Swedish Institute of Microelectronics, Sweden
Keywords :
Epitaxial growth; Fabrication; Frequency; Indium phosphide; Insulation; Integrated optoelectronics; Iron; Microelectronics; Surface emitting lasers; Wet etching;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752688
