Title :
RF driven multicap source for positive and negative ion beam production
Author :
Leung, Ka Nang ; Bachman, D.A. ; McDonald, D.S.
Author_Institution :
University of California
Keywords :
Ion beams; Production; Radio frequency;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697845