Title :
Optical wafer level mapping for MMIC processing
Author :
Kanber, H. ; Pan, E.T. ; Carver, G.E. ; Heebner, R.W.
Author_Institution :
AT&T Bell Laboratories, Princeton, NJ
Keywords :
Gallium arsenide; Image edge detection; Laser beams; MMICs; Monolithic integrated circuits; Optical devices; Phased arrays; Photoluminescence; Proximity effect; Spatial resolution;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752696
