Title :
Fe doped semi-insulating indium phosphide substrate characterization for device applications
Author :
Grattepain, C. ; Huber, A.M.
Author_Institution :
THOMSON-CSF LCR, France
Keywords :
Chemicals; Crystalline materials; Etching; Indium phosphide; Iron; Optical materials; Optical microscopy; Optical surface waves; Optoelectronic devices; Substrates;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752699