Title :
Vth control in GaAs by substrate parameters
Author :
Kaminaka, K. ; Morishita, H. ; Kiyama, M. ; Kawasaki, A. ; Yokogawa, M. ; Fujita, K. ; Akai, S.
Author_Institution :
Sumitomo Electric Industries, Ltd., Japan
Keywords :
Absorption; Conductivity; FETs; Gallium arsenide; III-V semiconductor materials; Industrial control; Insulation; Ion implantation; Substrates; Vibration measurement;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752716