DocumentCode
2653078
Title
Vth control in GaAs by substrate parameters
Author
Kaminaka, K. ; Morishita, H. ; Kiyama, M. ; Kawasaki, A. ; Yokogawa, M. ; Fujita, K. ; Akai, S.
Author_Institution
Sumitomo Electric Industries, Ltd., Japan
fYear
1992
fDate
21-24 Apr 1992
Firstpage
307
Lastpage
312
Keywords
Absorption; Conductivity; FETs; Gallium arsenide; III-V semiconductor materials; Industrial control; Insulation; Ion implantation; Substrates; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN
0-7503-0242-9
Type
conf
DOI
10.1109/SIM.1992.752716
Filename
752716
Link To Document