High precision adaptive control for piezo-actuated stage

Author

Chen, Xinkai ; Ozaki, Toshikuni

Author_Institution

Dept. of Electron. & Inf. Syst., Shibaura Inst. of Technol., Saitama, Japan

fYear

2010

fDate

14-18 Dec. 2010

Firstpage

1440

Lastpage

1445

Abstract

The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Keywords

adaptive control; control system synthesis; piezoelectric actuators; stability; Prandtl-Ishlinskii model; controller design; global stability; high precision adaptive control; hysteretic nonlinearity existence; piezo electric actuator; piezo-actuated stage; positioning mechanism; Actuators; Adaptation model; Adaptive control; Force; Hysteresis; Stability analysis; Steady-state;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Biomimetics (ROBIO), 2010 IEEE International Conference on

Conference_Location

Tianjin

Print_ISBN

978-1-4244-9319-7

Type

conf

DOI

10.1109/ROBIO.2010.5723541

Filename

5723541