Title :
Thermal stress analysis of the microtoroid under CO2 laser
Author :
Jiang, Guoqing ; Shubin Yan ; Yan, Shubin ; Xiong, Jijun
Author_Institution :
Nat. Key Lab. For Electron. Meas. Technol., North Univ. of China, Taiyuan, China
Abstract :
The planar microtoroid with unique whispering gallery mode (WGM) has ultra-high Q value (UHQ) and better optical property. In order to get the UHQ cavity, it is very important to deal with the surface of microtoroid using CO2 laser reflow during the fabrication process. Because of the TEM00 laser output, there will be thermal stress which affects the Q value badly. In this paper, we design physical model and analyze the temperature distribution theoretically. Furthermore, thermal stress of different microtoroids has been tested with Raman Spectral Analyzer. At last we found that when the optical path is stabile and the lens is fixed the output power in the 7/1000 duty cycle of 30 minutes long pulse will have a good result.
Keywords :
gas lasers; optical properties; spectral analysers; temperature distribution; thermal stresses; whispering gallery modes; Raman spectral analyzer; carbon dioxide laser reflow; optical property; planar microtoroid; temperature distribution; thermal stress analysis; ultra-high Q value; whispering gallery mode; Laser modes; Laser theory; Optical device fabrication; Semiconductor device modeling; Spectral analysis; Surface emitting lasers; Temperature distribution; Testing; Thermal stresses; Whispering gallery modes; CO2 laser; Raman frequency shift; microtoroid; thermal stress;
Conference_Titel :
ASIC, 2009. ASICON '09. IEEE 8th International Conference on
Conference_Location :
Changsha, Hunan
Print_ISBN :
978-1-4244-3868-6
Electronic_ISBN :
978-1-4244-3870-9
DOI :
10.1109/ASICON.2009.5351518