Title :
Flow field plate of micro fuel cell fabrication in UV-nanoimprint lithography
Author :
Weihua, Si ; Xiaowen, Dong ; Wenqi, Gu ; Zewen, Liu
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
A new way is brought forward for the fabrication of the flow field plate of micro fuel cell in UV-nanoimprint lithography. The flow field plate of micro fuel cell is fabricated which structure is gridding. The self-breath micro fuel cell is designed, with which the flow field plate is proved in effect. The cost and processing difficulty of micro fuel cell are reduced.
Keywords :
fuel cells; micromechanical devices; nanolithography; soft lithography; ultraviolet lithography; UV-nanoimprint lithography; flow field plate; gridding; micro fuel cell fabrication; Costs; Current density; Etching; Fabrication; Fuel cells; Lithography; Nanolithography; Polymers; Steel; Temperature; Flow field plate; Micro fuel cell; Nanoimprint lithography; UV-nanoimprint lithography;
Conference_Titel :
ASIC, 2009. ASICON '09. IEEE 8th International Conference on
Conference_Location :
Changsha, Hunan
Print_ISBN :
978-1-4244-3868-6
Electronic_ISBN :
978-1-4244-3870-9
DOI :
10.1109/ASICON.2009.5351521
