DocumentCode :
2653734
Title :
Numerical Simulation Of Advanced RIF Plasma Sources
Author :
Montalvo ; Carrera ; Lebrun, M. ; Pekker, L.
Author_Institution :
Valley Research Corporation
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
122
Lastpage :
122
Keywords :
Elementary particle vacuum; Numerical simulation; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Plasma waves; Tunneling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.697850
Filename :
697850
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2653734
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