• DocumentCode
    2653734
  • Title

    Numerical Simulation Of Advanced RIF Plasma Sources

  • Author

    Montalvo ; Carrera ; Lebrun, M. ; Pekker, L.

  • Author_Institution
    Valley Research Corporation
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    122
  • Lastpage
    122
  • Keywords
    Elementary particle vacuum; Numerical simulation; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Plasma waves; Tunneling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697850
  • Filename
    697850
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2653734