DocumentCode :
2653939
Title :
Digital Etching Of GaAs
Author :
Aoyagi, Yoshinobu ; Shinmura, Kouji ; Kawasaki, Kiyoshi ; Gamo, K. ; Namba, Susumu
Author_Institution :
Osaka University
fYear :
1991
fDate :
29 Jul-2 Aug 1991
Firstpage :
62
Lastpage :
63
Keywords :
Atomic beams; Atomic layer deposition; Chemical processes; Controllability; Digital control; Feeds; Gallium arsenide; Sputter etching; Substrates; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
Type :
conf
DOI :
10.1109/LEOSST.1991.639020
Filename :
639020
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2653939
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