A novel PDMS diaphragm micropump based on ICPF actuator

This article presented the development of a novel polydimethylsiloxane (PDMS) micro pump based on ICPF (Ionic Conducting Polymer Film) actuator toward biomedical system and drug delivery system. ICPF actuator provided an actuating approach for the demand of the miniaturization and low actuation voltages. This micropump is composed of ICPF equipped in a sealed actuating chamber, two check valves which are normally closed. Due to ICPF bending force and thermo pneumatic force generated by Joel heat, the PDMS diaphragm which adheres to the ICPF is driven reciprocating. So the liquid in the working liquid chamber can be pumped from inlet to outlet. A physics based model was developed to show the relationship between input voltage and flow rate. Superior pumping performance was achieved when the duty ratio of the voltage applied to the ICPF actuator was 40%. While in comparison, the pump with sealed actuating chamber design was better in performance than that with opening chamber. And some experiments were manipulated to show the characteristics of the ICPF actuator and the check valve. Experimental results indicate that a flow rate as high as 202 μl/min at a driving frequency of 2Hz and at an input voltage of 5V. The development of this micropump can be a promising approach for further biomedical and chemical analysis applications.