Title :
The Impact Of The Impurity Induced Layer Disordering Process On Optoelectronic Microfabrication
Author :
Thornton, Robert L.
Author_Institution :
Xerox Palo Alto Research Center, 3333 Coyote Hill Rd., Palo Alto, CA 94304
fDate :
29 Jul-2 Aug 1991
Keywords :
Consumer electronics; Impurities; Laboratories; Laser theory; Optical device fabrication; Optical devices; Optical waveguides; Optoelectronic devices; Physics; Waveguide lasers;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.639024
