Title :
Calculation Of The Electron Energy Distribution Function In Electron Cyclotron Resonance Etching Plasmas
Author :
Hussein, M.Z.B. ; Emmert ; Hershkowitz, Noah
Author_Institution :
University of Wisconsin
Keywords :
Cyclotrons; Distribution functions; Electrons; Etching; Plasma applications; Plasma simulation; Plasma sources; Plasma temperature; Programmable logic arrays; Resonance;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697860
