DocumentCode
2655853
Title
Analysis Of The Electromagnetic Excitation Of The Discharge In An ECR Multipolar Plasma Source
Author
Tan, Wei ; Mak, Pui-In ; Grotjohn, Timothy A.
Author_Institution
Michigan State University
fYear
1993
fDate
1-3 June 1993
Firstpage
126
Lastpage
126
Keywords
Electromagnetic analysis; Electromagnetic heating; Electrons; Fault location; Plasma applications; Plasma materials processing; Plasma properties; Plasma simulation; Plasma sources; Plasma temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location
Tampa, FL, USA
Print_ISBN
0-7803-0716-X
Type
conf
DOI
10.1109/PLASMA.1992.697861
Filename
697861
Link To Document