• DocumentCode
    2655853
  • Title

    Analysis Of The Electromagnetic Excitation Of The Discharge In An ECR Multipolar Plasma Source

  • Author

    Tan, Wei ; Mak, Pui-In ; Grotjohn, Timothy A.

  • Author_Institution
    Michigan State University
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    126
  • Lastpage
    126
  • Keywords
    Electromagnetic analysis; Electromagnetic heating; Electrons; Fault location; Plasma applications; Plasma materials processing; Plasma properties; Plasma simulation; Plasma sources; Plasma temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697861
  • Filename
    697861