• DocumentCode
    2655927
  • Title

    Effects Of Ion Beam Etching On The Magnetic Properties Of Permalloy Thin Films

  • Author

    Kim, S.D. ; Ryu, H.J. ; Lim, S.H. ; Kim, H.J. ; Lee, J.J.

  • Author_Institution
    Korea Institute of Science and Technology
  • fYear
    1997
  • fDate
    1-4 April 1997
  • Keywords
    Atomic force microscopy; Coercive force; Ion beams; Magnetic films; Magnetic properties; Rough surfaces; Surface morphology; Surface roughness; Transistors; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
  • Conference_Location
    New Orleans, LA, USA
  • Print_ISBN
    0-7803-3862-6
  • Type

    conf

  • DOI
    10.1109/INTMAG.1997.597719
  • Filename
    597719