DocumentCode
2655927
Title
Effects Of Ion Beam Etching On The Magnetic Properties Of Permalloy Thin Films
Author
Kim, S.D. ; Ryu, H.J. ; Lim, S.H. ; Kim, H.J. ; Lee, J.J.
Author_Institution
Korea Institute of Science and Technology
fYear
1997
fDate
1-4 April 1997
Keywords
Atomic force microscopy; Coercive force; Ion beams; Magnetic films; Magnetic properties; Rough surfaces; Surface morphology; Surface roughness; Transistors; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location
New Orleans, LA, USA
Print_ISBN
0-7803-3862-6
Type
conf
DOI
10.1109/INTMAG.1997.597719
Filename
597719
Link To Document