On variable weight ewma based Run-to-Run Control in mixed product process

Author

Ying, Zheng ; Mingyang, Hou

Author_Institution

Dept. of Control Sci. & Eng., Huazhong Univ. of Sci. & Technol., Wuhan

fYear

2008

fDate

16-18 July 2008

Firstpage

6

Lastpage

10

Abstract

Run-to-run control (R2R) is adopted in semi-conductor manufacturing industries nowadays. Exponent weighted moving average (EWMA) is an important R2R algorithm. Discount factor is major parameter of EWMA controller. Semi-conductor manufacturing process research is generally dealing with single product. However, practically there are high mixed products processed at one tool. In this work, high-mix of mixed product in practical manufacturing process is considered in the model, product-based method is used, and EWMA control algorithm with variable discount factor is adopted. Its feasibility is proved by simulation results of the practical process.

Keywords

integrated circuit manufacture; statistical process control; exponent weighted moving average; mixed product process; product-based method; run-to-run control; semiconductor manufacturing industries; variable weight EWMA; Adaptive control; Lithography; Manufacturing industries; Manufacturing processes; Process control; Programmable control; Weight control; Yttrium; Discount Factor; Exponent Weighted Moving Average; Product-Based Control; Run-to-Run Control;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Conference, 2008. CCC 2008. 27th Chinese

Conference_Location

Kunming

Print_ISBN

978-7-900719-70-6

Electronic_ISBN

978-7-900719-70-6

Type

conf

DOI

10.1109/CHICC.2008.4604924

Filename

4604924