Title :
On variable weight ewma based Run-to-Run Control in mixed product process
Author :
Ying, Zheng ; Mingyang, Hou
Author_Institution :
Dept. of Control Sci. & Eng., Huazhong Univ. of Sci. & Technol., Wuhan
Abstract :
Run-to-run control (R2R) is adopted in semi-conductor manufacturing industries nowadays. Exponent weighted moving average (EWMA) is an important R2R algorithm. Discount factor is major parameter of EWMA controller. Semi-conductor manufacturing process research is generally dealing with single product. However, practically there are high mixed products processed at one tool. In this work, high-mix of mixed product in practical manufacturing process is considered in the model, product-based method is used, and EWMA control algorithm with variable discount factor is adopted. Its feasibility is proved by simulation results of the practical process.
Keywords :
integrated circuit manufacture; statistical process control; exponent weighted moving average; mixed product process; product-based method; run-to-run control; semiconductor manufacturing industries; variable weight EWMA; Adaptive control; Lithography; Manufacturing industries; Manufacturing processes; Process control; Programmable control; Weight control; Yttrium; Discount Factor; Exponent Weighted Moving Average; Product-Based Control; Run-to-Run Control;
Conference_Titel :
Control Conference, 2008. CCC 2008. 27th Chinese
Conference_Location :
Kunming
Print_ISBN :
978-7-900719-70-6
Electronic_ISBN :
978-7-900719-70-6
DOI :
10.1109/CHICC.2008.4604924
