Title :
Polymer coated thin film plate acoustic resonators (FPAR) for gas sensing applications
Author :
Arapan, L. ; Katardjiev, I. ; Yantchev, V. ; Alexieva, G. ; Strashilov, V. ; Avramov, I.D. ; Radeva, E.
Author_Institution :
Dept. Solid State Electron., Uppsala Univ., Uppsala, Sweden
Abstract :
Mass sensitivity of thin aluminum nitride (AlN) film S0 plate wave resonators is theoretically and experimentally studied. Here, two-port 888MHz synchronous thin film plate acoustic resonators (FPAR) are micromachined and subsequently coated with plasma-polymerized hexamethyldisiloxane (pp-HMDSO) thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented in a comparative manner. Measurements in gas phase environment are further presented in a comparative manner.
Keywords :
III-V semiconductors; aluminium compounds; gas sensors; micromachining; microsensors; polymers; surface acoustic wave resonators; wide band gap semiconductors; AlN; FPAR; frequency 888 fHz; gas sensing application; mass sensitivity; micromachining; plasma polymerized hexamethyldisiloxane; polymer coated thin film plate acoustic resonators; pp-HMDSO thin films; two-port synchronous thin film plate acoustic resonators; Films; Polymers; Resonant frequency; Sensitivity; Sensors; Surface acoustic waves;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977282
