DocumentCode
2656425
Title
A Generalized Thermodynamic Model Of SF6 Including Analytical Pressure Dependence
Author
Scarpa, P. ; Dauby, B. ; Legros, W.
Author_Institution
University of Liege
fYear
1993
fDate
1-3 June 1993
Firstpage
127
Lastpage
128
Keywords
Gases; Ionization; Plasma chemistry; Plasma properties; Plasma simulation; Plasma temperature; Sulfur hexafluoride; Temperature dependence; Temperature distribution; Thermodynamics;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location
Tampa, FL, USA
Print_ISBN
0-7803-0716-X
Type
conf
DOI
10.1109/PLASMA.1992.697864
Filename
697864
Link To Document