Title :
A Generalized Thermodynamic Model Of SF6 Including Analytical Pressure Dependence
Author :
Scarpa, P. ; Dauby, B. ; Legros, W.
Author_Institution :
University of Liege
Keywords :
Gases; Ionization; Plasma chemistry; Plasma properties; Plasma simulation; Plasma temperature; Sulfur hexafluoride; Temperature dependence; Temperature distribution; Thermodynamics;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697864