• DocumentCode
    2656425
  • Title

    A Generalized Thermodynamic Model Of SF6 Including Analytical Pressure Dependence

  • Author

    Scarpa, P. ; Dauby, B. ; Legros, W.

  • Author_Institution
    University of Liege
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    127
  • Lastpage
    128
  • Keywords
    Gases; Ionization; Plasma chemistry; Plasma properties; Plasma simulation; Plasma temperature; Sulfur hexafluoride; Temperature dependence; Temperature distribution; Thermodynamics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697864
  • Filename
    697864