Drive level dependence of doubly rotated langasite resonators with different configurations

The miniaturization of crystal resonators and filters towards the MEMS (Micro-Electro-Mechanical Systems) and nano-structured scales demands improvement of nonlinear piezoelectricity theory and a better understanding of the nonlinear behavior of new crystal materials. The nonlinearities affect the quality factor and acoustic behavior of MEMS and nano-structured resonators and filters. Among these nonlinear effects, drive level dependence (DLD), which describes the instability of the resonator frequency due to voltage level and/or power density, is an urgent problem for miniaturized resonators. Langasite, a new promising piezoelectric material, is of recent interest for a variety of applications because of its good temperature behavior, good piezoelectric coupling, low acoustic loss and high Q factor. It has been recently used to make high temperature MEMS. In this article, experimental measurements of drive level dependence of langasite resonators with different configurations (plano-plano, single bevel, and double bevel) are reported. The results show that the resonator configuration affects the DLD of the langasite resonator. The drive sensitivity of resonators with different configurations is determined.