DocumentCode
2656501
Title
Dry Etch Damage In Quantum Wires
Author
Wilkinson, C.D.W.
Author_Institution
University of Glasgow, Scotland, UK
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
83
Lastpage
83
Keywords
Dry etching; Optical materials; Quantum dots; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639032
Filename
639032
Link To Document