Title :
High sensitivity MEMS capacitive tilt sensor using multi-resonant cylindrical waveguide structure
Author :
Panwar, B.S. ; Panwar, Siddharth
Author_Institution :
Centre for Appl. Res. in Electron., Indian Inst. of Technol. Delhi, Delhi, India
Abstract :
The present work describes a high sensitivity multi-anti-resonance CMOS process compatible MEMS liquid dielectric capacitive tilt sensor. The dual frequency excitation of four electrode structure enables anti-resonance at equally spaced multiple frequencies and capability of measuring the tilt with enhanced sensitivity along with the direction of tilt.
Keywords :
capacitive sensors; circular waveguides; dielectric liquids; microsensors; CMOS process; MEMS sensor; capacitive tilt sensor; dual frequency excitation; liquid dielectric sensor; multiresonant cylindrical waveguide; Capacitance; Cavity resonators; Electric potential; Electrodes; Magnetic separation; Micromechanical devices; Silicon;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977292
