Title :
Ground coplanar waveguide to rectangular waveguide transition
Author :
Vahidpour, M. ; Sarabandi, K.
Author_Institution :
EECS Dept., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
In this study, we propose a very simple and easy-to-fabricate transition from a low loss ground coplanar waveguide (GCPW) with sidewalls to rectangular waveguide. It consists of two steps of transition, one from an ordinary CPW to GCPW with side walls, and the other from GCPW to rectangular waveguide. Since the design is very simple and the features are aligned with the Cartesian coordinates, it highly compatible with microfabrication processes and can be fabricated using either lithography of thick photoresists or multi-step deep reactive ion etching (DRIE) of silicon. A back to back structure is fabricated by conventional machining methods at Ka-band to validate the results.
Keywords :
coplanar waveguides; lithography; machining; microfabrication; rectangular waveguides; sputter etching; Cartesian coordinates; Ka-band; ground coplanar waveguide; lithography; machining methods; microfabrication processes; multistep deep reactive ion etching; photoresists; rectangular waveguide transition; silicon; Coplanar waveguides; Dielectric substrates; Feeds; Frequency; Probes; Rectangular waveguides; Resonance; Submillimeter wave filters; Waveguide discontinuities; Waveguide transitions;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2009. APSURSI '09. IEEE
Conference_Location :
Charleston, SC
Print_ISBN :
978-1-4244-3647-7
DOI :
10.1109/APS.2009.5172265