DocumentCode
2657218
Title
Comparative study of p+/n+ gate modified Saddle MOSFET and p+/n+ gate bulk FinFETs for sub-50 nm DRAM cell transistors
Author
Park, Ki-Heung ; Han, K.R. ; Kim, Y.M. ; Choi, B.-K. ; Lee, Jong-Ho
Author_Institution
Kyungpook Nat. Univ., Daegu
fYear
2007
fDate
12-14 Dec. 2007
Firstpage
1
Lastpage
2
Abstract
In this work, we propose p+/n+ gate and apply it to modified saddle MOSFET and bulk FinFET to solve the problems mentioned above. We compare both devices in terms of scalability and show electric field profiles. The device characteristics are studied by using 3-D device simulator.
Keywords
DRAM chips; MOSFET; nanoelectronics; p-n junctions; semiconductor device models; 3-D device simulator; DRAM cell transistors; electric field profiles; p+-n+ gate bulk FinFET; p+-n+ gate modified saddle MOSFET; scalability terms; size 50 nm; Doping profiles; Educational institutions; FinFETs; Geometry; Leakage current; MOSFET circuits; Random access memory; Scalability; Threshold voltage; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2007 International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-1892-3
Electronic_ISBN
978-1-4244-1892-3
Type
conf
DOI
10.1109/ISDRS.2007.4422285
Filename
4422285
Link To Document