Title :
Predicting the reliability of metal-insulator-metal capacitors (MIMC) in analog devices by modeling
Author :
Greenwood, Bruce ; Prasad, Jagdish
Author_Institution :
AMI Semicond., Pocatello
Abstract :
In this study MIMC reliability has been assessed using Vbd distributions to determine parameters for a ´dielectric thinning´ model. Expected failures over 10- year of life are determined for several products with MIM capacitors. The effectiveness of burn in is evaluated in reducing failures. Design practices to reduce MIMC failures are proposed, such as minimizing application voltage and ensuring stability at V-stress for MIMCs.
Keywords :
MIM devices; analogue circuits; reliability; thin film capacitors; MIMC reliability; V-stress; analog devices; dielectric thinning model; failure reduction; metal-insulator-metal capacitors; Analog circuits; Dielectric breakdown; Educational institutions; MIM capacitors; Parasitic capacitance; Predictive models; Silicon compounds; Temperature; USA Councils; Voltage;
Conference_Titel :
Semiconductor Device Research Symposium, 2007 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-1892-3
Electronic_ISBN :
978-1-4244-1892-3
DOI :
10.1109/ISDRS.2007.4422294
