An adaptive nonlinear estimator for the MEMS capacitive accelerometer based on adaptive input-output feedback linearization

Author

Hassani, F. Arab ; Payam, A. Farrokh ; Fathipour, M. ; Farbiz, F.

Author_Institution

Univ. of Tehran, Tehran

fYear

2007

fDate

12-14 Dec. 2007

Firstpage

1

Lastpage

2

Abstract

This paper presents a new estimator for the conventional capacitive MEMS accelerometer. This scheme is realized by adding an adaptive nonlinear observer to a conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. We outline the design of an online estimator for a capacitive MEMS accelerometer to detect changes in spring stiffness (k) and damping factor (b).

Keywords

accelerometers; adaptive control; closed loop systems; linearisation techniques; microsensors; nonlinear control systems; three-term control; MEMS capacitive accelerometer; PID closed loop system; adaptive input-output feedback linearization; adaptive nonlinear estimator; damping factor; online estimation; parameter variation; self testing; spring stiffness; Accelerometers; Damping; Educational institutions; Feedback; Frequency; Mathematical model; Micromechanical devices; Springs; Stress; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Device Research Symposium, 2007 International

Conference_Location

College Park, MD

Print_ISBN

978-1-4244-1892-3

Electronic_ISBN

978-1-4244-1892-3

Type

conf

DOI

10.1109/ISDRS.2007.4422308

Filename

4422308