Title :
Vertical integration using transfer printing
Author :
Tunnell, A.J. ; Ballarotto, V.W. ; Hines, D.R. ; Williams, E.D.
Author_Institution :
Univ. of Maryland, College Park
Abstract :
Transfer printing can be used to fabricate individual thin-film transistors on flexible substrates using a variety of non-traditional semiconductors. However, practical implementation of transfer printing for large scale or hybrid circuits requires a mechanism to connect individual elements vertically through the dielectric layer. We have developed a process for fabricating vias with transfer printing by sequentially printing two separate sub-assemblies.
Keywords :
CMOS integrated circuits; printing; thin film transistors; flexible substrates; hybrid circuits; large scale circuits; thin-film transistors; transfer printing; vertical integration; CMOS technology; Educational institutions; Electrodes; Gold; Inductors; Integrated circuit interconnections; Laboratories; Positron emission tomography; Printing; Spirals;
Conference_Titel :
Semiconductor Device Research Symposium, 2007 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-1892-3
Electronic_ISBN :
978-1-4244-1892-3
DOI :
10.1109/ISDRS.2007.4422336