Title :
Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations
Author :
Papin, G. ; Levy, R. ; Bosseboeuf, A. ; Fabbri, F. ; Parrain, F. ; Malak, M. ; Bourouina, T. ; Lissorgues, G. ; Poulichet, P.
Author_Institution :
DMPH, ONERA, Chatillon, France
Abstract :
Optical actuation and detection of MEMS resonators can improve the resolution of their motion detection compared to standard detection techniques (capacitive, piezoelectric). In this paper, a behavioral model of MEMS resonator with optical actuation and detection and the associated oscillator circuit are presented and used to determine its performances.
Keywords :
micromechanical resonators; oscillators; MEMS resonators; associated oscillator circuit; behavioral modeling; motion detection; optical actuation; optical detection; phase noise simulations; Integrated circuit modeling; Laser beams; Noise; Optical interferometry; Optical resonators; Optical sensors; Oscillators;
Conference_Titel :
Frequency Control Symposium (FCS), 2012 IEEE International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1821-2
DOI :
10.1109/FCS.2012.6243656
