DocumentCode
2658720
Title
RF Nanoelectromechanical switch employing nanowires
Author
Ahmad, Mahmoud Al ; Habtoun, Sabrina ; Bergaud, Christian ; Dilhan, Monique ; Bourrier, David ; Plana, Robert
Author_Institution
LAAS-CNRS, Toulouse
fYear
2007
fDate
12-14 Dec. 2007
Firstpage
1
Lastpage
2
Abstract
In this work, we present the results of our investigations of an RF nanoswitch device based on nanowires array. The nanowires are used to make a DC contact between the signal line of a CPW line and its ground. Silicon is used as a substrate. The switch is formed by the nanowire and the pillar.The design of a RF NEMS based on vertical metallic nanowires array shows a good performance up to 27 GHz.
Keywords
coplanar waveguides; microswitches; nanoelectronics; nanowires; CPW line; DC contact; NEMS design; RF nanoelectromechanical switch; vertical metallic nanowires array; Aluminum; Contacts; Coplanar waveguides; Educational institutions; Gold; Microwave technology; Nanowires; Radio frequency; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2007 International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-1892-3
Electronic_ISBN
978-1-4244-1892-3
Type
conf
DOI
10.1109/ISDRS.2007.4422362
Filename
4422362
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