Title :
RF Nanoelectromechanical switch employing nanowires
Author :
Ahmad, Mahmoud Al ; Habtoun, Sabrina ; Bergaud, Christian ; Dilhan, Monique ; Bourrier, David ; Plana, Robert
Author_Institution :
LAAS-CNRS, Toulouse
Abstract :
In this work, we present the results of our investigations of an RF nanoswitch device based on nanowires array. The nanowires are used to make a DC contact between the signal line of a CPW line and its ground. Silicon is used as a substrate. The switch is formed by the nanowire and the pillar.The design of a RF NEMS based on vertical metallic nanowires array shows a good performance up to 27 GHz.
Keywords :
coplanar waveguides; microswitches; nanoelectronics; nanowires; CPW line; DC contact; NEMS design; RF nanoelectromechanical switch; vertical metallic nanowires array; Aluminum; Contacts; Coplanar waveguides; Educational institutions; Gold; Microwave technology; Nanowires; Radio frequency; Switches; Voltage;
Conference_Titel :
Semiconductor Device Research Symposium, 2007 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-1892-3
Electronic_ISBN :
978-1-4244-1892-3
DOI :
10.1109/ISDRS.2007.4422362
