Title :
GHz aluminum nitride optomechanical wheel resonators
Author :
Xiong, Chi ; Sun, Xiankai ; Fong, King Y. ; Tang, Hong X.
Author_Institution :
Dept. of Electr. Eng., Yale Univ. New Haven, New Haven, CT, USA
Abstract :
Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offers low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125,000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.3×10-18 m/√Hz in ambient air.
Keywords :
Brownian motion; III-V semiconductors; Q-factor; aluminium compounds; integrated optics; micro-optomechanical devices; micromechanical resonators; optical losses; optical resonators; wide band gap semiconductors; AlN; Brownian motion; GHz aluminum nitride optomechanical wheel resonators; GHz contour mode; Q factor; ambient air; displacement sensitivity; electromechanical properties; integrated microring resonators; low optical loss; mechanical loss; microeletromechanical resonators; optical quality factor; optomechanical material; optomechanical transduction; suspended rings; Couplings; Optical device fabrication; Optical filters; Optical ring resonators; Optical sensors; Resonant frequency;
Conference_Titel :
Frequency Control Symposium (FCS), 2012 IEEE International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1821-2
DOI :
10.1109/FCS.2012.6243664
