Title :
Investigation of SAW and PSAW propagation in LGS crystal by scanning electron microscopy method
Author :
Sakharov, S.A. ; Buzanov, O.A. ; Roshchupkin, D.V.
Author_Institution :
FOMOS Technol. Co., Moscow, Russia
Abstract :
This paper reports the investigation of the SAW and PSAW propagations in X-, Y- and Z-cuts of LGS crystal by scanning electron microscopy method which is very useful for qualitative and quantitative analysis of acoustic radiation wavefields in piezoelectric materials. Using the scanning electron microscopy method we visualized the diffraction patterns in the acoustic beams on the crystal surface and determined the power flow angles for SAW and PSAW.
Keywords :
acoustic wave diffraction; acoustic wave propagation; chemical analysis; gallium compounds; lanthanum compounds; piezoelectric materials; scanning electron microscopy; surface acoustic waves; LGS crystal; La3Ga5SiO14; SAW propagation; acoustic beams; acoustic radiation wavefields; crystal surface; diffraction patterns; piezoelectric materials; power flow angles; quantitative analysis; scanning electron microscopy; Acoustic beams; Acoustic diffraction; Acoustic propagation; Acoustic waves; Electron beams; Load flow; Piezoelectric materials; Scanning electron microscopy; Surface acoustic waves; Visualization;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International
Print_ISBN :
0-7803-7688-9
DOI :
10.1109/FREQ.2003.1275177
