Investigation of SAW and PSAW propagation in LGS crystal by scanning electron microscopy method

Author

Sakharov, S.A. ; Buzanov, O.A. ; Roshchupkin, D.V.

Author_Institution

FOMOS Technol. Co., Moscow, Russia

fYear

2003

fDate

4-8 May 2003

Firstpage

698

Lastpage

700

Abstract

This paper reports the investigation of the SAW and PSAW propagations in X-, Y- and Z-cuts of LGS crystal by scanning electron microscopy method which is very useful for qualitative and quantitative analysis of acoustic radiation wavefields in piezoelectric materials. Using the scanning electron microscopy method we visualized the diffraction patterns in the acoustic beams on the crystal surface and determined the power flow angles for SAW and PSAW.

Keywords

acoustic wave diffraction; acoustic wave propagation; chemical analysis; gallium compounds; lanthanum compounds; piezoelectric materials; scanning electron microscopy; surface acoustic waves; LGS crystal; La₃Ga₅SiO₁₄; SAW propagation; acoustic beams; acoustic radiation wavefields; crystal surface; diffraction patterns; piezoelectric materials; power flow angles; quantitative analysis; scanning electron microscopy; Acoustic beams; Acoustic diffraction; Acoustic propagation; Acoustic waves; Electron beams; Load flow; Piezoelectric materials; Scanning electron microscopy; Surface acoustic waves; Visualization;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International

ISSN

1075-6787

Print_ISBN

0-7803-7688-9

Type

conf

DOI

10.1109/FREQ.2003.1275177

Filename

1275177