Electrical characterization of Pd-PdO nanocomposites and PdO thin films prepared by thermal oxidation of Pd

Author

García-Serrano, O. ; Peña-Sierra, R. ; Romero-Paredes, G.

Author_Institution

Dept. of Electr. Eng., CINVESTAV, Mexico City, Mexico

fYear

2010

fDate

8-10 Sept. 2010

Firstpage

595

Lastpage

598

Abstract

Electrical characterization of nanometric PdO films produced by thermal oxidation of Pd films in air at atmospheric pressure is reported. The PdO films were characterized using the van der Pauw-Hall method to establish the effects of oxidation degree of Pd thin films. The measured carrier mobility is directly related to the oxidation rate and film thickness. The produced films are n-type with carrier concentration of 10¹⁷ to 10²⁰ cm^-3 and electron mobility of 22-38 and 20-28 cm²/Vs for complete and partially oxidized films, respectively. XRD studies were used as a tool to determine the complete oxidation of the Pd film considering the volume change in the unit cells of Pd and PdO.

Keywords

X-ray diffraction; carrier density; electron mobility; nanocomposites; nanofabrication; nanostructured materials; oxidation; palladium; palladium compounds; thin films; Pd-PdO; PdO; XRD; atmospheric pressure; carrier concentration; carrier mobility; electrical property; electron mobility; nanocomposites; nanometric films; thermal oxidation; thin films; van der Pauw-Hall method; Conductivity; Electrical engineering; Films; Oxidation; Temperature measurement; X-ray scattering; Composite electrical properties; Hall measurements; Nanometric Films; Pd; PdO; Sputtering; partially oxidized films;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Engineering Computing Science and Automatic Control (CCE), 2010 7th International Conference on

Conference_Location

Tuxtla Gutierrez

Print_ISBN

978-1-4244-7312-0

Type

conf

DOI

10.1109/ICEEE.2010.5608620

Filename

5608620