A novel surface wave transducer based on periodically poled piezoelectric domain

Author

Ballandras, S. ; Daniau, W. ; Gautier, B. ; Hauden, D. ; Wilm, M. ; Laude, V. ; Ruch, V. ; Flambart, S.

Author_Institution

Univ. de Franche-Comte, Besancon, France

fYear

2003

fDate

4-8 May 2003

Firstpage

893

Lastpage

896

Abstract

A surface wave transducer using a thin ferroelectric film deposited atop silicon and periodically poled has been theoretically analysed. Fundamental guiding properties of such devices are extracted from numerical computations. A low frequency validation of the proposed principle is reported using a periodically poled PZT plate glued on a silicon wafer.

Keywords

dielectric polarisation; electric domains; ferroelectric materials; ferroelectric thin films; lead compounds; numerical analysis; piezoelectric transducers; piezoelectricity; surface acoustic wave transducers; PZT; PZT plate; PbZrO3TiO3; Si; dielectric polarisation; guiding properties; numerical computation; periodically poled piezoelectric domain; piezoelectricity; surface wave transducer; thin ferroelectric film; Acoustic signal detection; Acoustic transducers; Electrodes; Ferroelectric films; Frequency; Optical surface waves; Piezoelectric transducers; Silicon; Substrates; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International

ISSN

1075-6787

Print_ISBN

0-7803-7688-9

Type

conf

DOI

10.1109/FREQ.2003.1275208

Filename

1275208