Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography

Field emission (FE) of electrons from nanostructured graphitic carbon-based materials has been an area of intense investigation in recent years. Each field emitting device has control gates and an electron emitting cathode, which emits electron when a sufficient voltage is applied at the gate electrode. Recently, a technique for fabricating gated cathode structures that uses a single in situ grown vertically aligned carbon nanofiber (VACNF) as a FE element has been reported. This paper presents digitally addressable VACNFs for implementation of massively parallel maskless lithography.