Title :
Compensation, tuning, and trimming of MEMS resonators
Author :
Ayazi, Farrokh ; Tabrizian, Roozbeh ; Sorenson, Logan
Author_Institution :
Center for MEMS & Microsyst. Technol., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Fundamental characteristics of MEMS resonators such as acoustic velocity and energy dissipation may have strong temperature and process dependencies that must be carefully compensated in applications requiring high degrees of stability and accuracy. This paper presents an overview of compensation, tuning, and trimming techniques for MEMS resonators. The use of these techniques in implementation of high precision and high performance MEMS resonators is described, and the benefits and challenges of different approaches are discussed and compared.
Keywords :
circuit stability; circuit tuning; compensation; micromechanical resonators; acoustic velocity; energy dissipation; high performance MEMS resonator compensation; trimming techniques; tuning techniques; Acoustics; Micromechanical devices; Resonant frequency; Silicon; Temperature sensors; Tuning;
Conference_Titel :
Frequency Control Symposium (FCS), 2012 IEEE International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1821-2
DOI :
10.1109/FCS.2012.6243717
