Compensation, tuning, and trimming of MEMS resonators

Fundamental characteristics of MEMS resonators such as acoustic velocity and energy dissipation may have strong temperature and process dependencies that must be carefully compensated in applications requiring high degrees of stability and accuracy. This paper presents an overview of compensation, tuning, and trimming techniques for MEMS resonators. The use of these techniques in implementation of high precision and high performance MEMS resonators is described, and the benefits and challenges of different approaches are discussed and compared.