Frequency-temperature analysis of MEMS AT-cut quartz resonators

Author

Yong, Y.-K. ; Vig, J. ; Ballato, A. ; Kubena, R. ; Closkey, R.M.

Author_Institution

Dept. of Civil & Environ. Eng., Rutgers Univ., Piscataway, NJ, USA

fYear

2003

fDate

4-8 May 2003

Firstpage

1095

Lastpage

1099

Abstract

An analytical study of the frequency-temperature behavior of MEMS AT-cut quartz resonator structures was performed. The piezoelectric, Lagrangian equations for the frequency-temperature behavior of quartz were employed. Two types of resonator structures were studied: A 1 GHz rectangular plate with rectangular electrodes and a 1 GHz rectangular ring electrode mesa (REM) plate. For MEMS resonators, the REM design confers certain advantages in attaining higher resonant frequencies and lower electrode noise.

Keywords

crystal resonators; micromechanical resonators; 1 GHz; GHz rectangular plate; GHz rectangular ring electrode mesa plate; Lagrangian equation; MEMS; electrode noise; frequency-temperature analysis; microelectromechanical devices; piezoelectric equation; quartz resonator; rectangular electrodes; resonant frequencies; Dielectric measurements; Electric variables measurement; Frequency; Lagrangian functions; Micromechanical devices; Permittivity measurement; Strain measurement; Stress measurement; Temperature; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International

ISSN

1075-6787

Print_ISBN

0-7803-7688-9

Type

conf

DOI

10.1109/FREQ.2003.1275244

Filename

1275244