DocumentCode :
2660442
Title :
Innovative control systems for MEMS inertial sensors
Author :
Kraft, Michael ; Wilcock, R. ; Almutairi, Bader
Author_Institution :
Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
fYear :
2012
fDate :
21-24 May 2012
Firstpage :
1
Lastpage :
6
Abstract :
In this paper a variety of innovative control systems for MEMS inertial sensors are discussed. These control interfaces have considerable potential to improve important characteristics of MEMS inertial sensors, such as linearity, bandwidth, dynamic range and susceptibility again fabrication tolerances. All control systems are based on the incorporation of the micromachined sensing element in a sigma-delta modulator loop forming an electro-mechanical sigma-delta modulator (EMSDM). A very effective design methodology for such EMSDM based on a Genetic Algorithm is introduced. Subsequently, a high order, single loop EMSDM and a Multi Stage Noise Shaping (MASH) EMSDM are discussed for an accelerometer. For MEMS gyroscopes, results from a bandpass EMSDM and a novel quadrature EMSDM are presented.
Keywords :
accelerometers; genetic algorithms; gyroscopes; micromachining; microsensors; sigma-delta modulation; MEMS gyroscopes; MEMS inertial sensors; accelerometer; bandpass EMSDM; control interfaces; electromechanical sigma-delta modulator loop; genetic algorithm; innovative control systems; micromachined sensing element; multistage noise shaping EMSDM; quadrature EMSDM; Acceleration; Accelerometers; Gyroscopes; Micromechanical devices; Multi-stage noise shaping; Sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium (FCS), 2012 IEEE International
Conference_Location :
Baltimore, MD
ISSN :
1075-6787
Print_ISBN :
978-1-4577-1821-2
Type :
conf
DOI :
10.1109/FCS.2012.6243749
Filename :
6243749
Link To Document :
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