Title :
Low frequency noise measurement of three-axis surface micro- machined silicon capacitive accelerometer
Author :
Mohd-Yasin, F. ; Nagel, D.J. ; Korman, C.E. ; Ong, D.S. ; Chuah, H.T.
Author_Institution :
Multimedia Univ., Cyberjaya
Abstract :
The authors performed the low frequency noise measurement (LFNM) technique to study noise characteristics of commercial accelerometers with single and dual axis. In this work, we studied the noise characteristics of a three-axis accelerometer using an improved and sensitive test setup to avoid cross-axis distortion.
Keywords :
accelerometers; capacitive sensors; electric noise measurement; micromachining; microsensors; silicon; LFNM technique; low frequency noise measurement technique; microsensors; surface micromachined silicon capacitive accelerometer; three-axis accelerometer; Acceleration; Accelerometers; Acoustic noise; Circuit noise; Frequency measurement; Low-frequency noise; Micromechanical devices; Noise figure; Noise measurement; Silicon;
Conference_Titel :
Semiconductor Device Research Symposium, 2007 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-1891-6
Electronic_ISBN :
978-1-4244-1892-3
DOI :
10.1109/ISDRS.2007.4422474
