In-Plane Photonic Transduction of SOI Microcantilever Sensors

Author

Nordin, G.P. ; Kim, S. ; Qian, Y. ; Noh, J.W. ; Jiang, J.

Author_Institution

Electr. & Comput. Eng. Dept., Brigham Young Univ., Provo, UT

fYear

2006

fDate

13-15 Sept. 2006

Firstpage

4

Lastpage

6

Abstract

In this paper, a new microcantilever transduction mechanism for silicon-on-insulator (SOI) microcantilevers that readily scales to large arrays while maintaining a very compact form factor and high sensitivity is introduced. This mechanism is based on differential optical detection of the cantilever tip position in which the cantilever itself forms a single mode optical ridge waveguide differential splitter.

Keywords

differential detection; integrated optics; micro-optomechanical devices; microsensors; optical beam splitters; optical sensors; optical signal detection; optical waveguide components; ridge waveguides; silicon-on-insulator; Si-SiO₂; cantilever tip; differential optical detection; form factor; in-plane photonic transduction; silicon-on-insulator microcantilever sensors; single mode optical ridge waveguide differential splitter; Atomic force microscopy; Biomedical optical imaging; Etching; Optical arrays; Optical losses; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors; Sensor arrays; Waveguide transitions;

fLanguage

English

Publisher

ieee

Conference_Titel

Group IV Photonics, 2006. 3rd IEEE International Conference on

Conference_Location

Ottawa, Ont.

Print_ISBN

1-4244-0096-1

Type

conf

DOI

10.1109/GROUP4.2006.1708146

Filename

1708146