DocumentCode
2661314
Title
Assembly of functional nanodebice using platinum/ tungsten nanowire
Author
Yang, Zhan ; Nakajima, Masahiro ; Fukuda, Toshio
Author_Institution
Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya, Japan
fYear
2009
fDate
9-11 Nov. 2009
Firstpage
237
Lastpage
242
Abstract
This paper presets the assembly of a functional device with double metal nanowire. A PZT cantilever was used for electrodes of the device and etched by FIB. Two carbon nanotubes (CNT) were assembled to the separated electrodes of PZT cantilever. A tungsten probe is etched by focused ion beam (FIB) into 300 nm in diameter and 25.4 ¿m in length. Then the probe is coated by parylene and cut the tip to open the tungsten. A tungsten nanowire with 907 nm in length and a platinum nanowire with 209 nm in length grew from the tip of the CNTs via field emission by introducing hexacabonyl tungsten and trimethyl cyclopentadienyl platinum individually inside a field emission electron microscope.
Keywords
carbon nanotubes; field emission electron microscopy; focused ion beam technology; nanoelectromechanical devices; nanowires; platinum; sputter etching; tungsten; PZT cantilever; carbon nanotubes; double metal nanowire; field emission electron microscope; functional device; functional nanodevice; hexacabonyl tungsten; platinum nanowire; trimethyl cyclopentadienyl platinum; tungsten nanowire; Assembly; Carbon nanotubes; Electrodes; Electron emission; Etching; Ion beams; Nanoscale devices; Platinum; Probes; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2009. MHS 2009. International Symposium on
Conference_Location
Nagoya
Print_ISBN
978-1-4244-5094-7
Electronic_ISBN
978-1-4244-5095-4
Type
conf
DOI
10.1109/MHS.2009.5352025
Filename
5352025
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