Title :
The Impact of the Rare-earth Precursor on the Composition, Structure and Luminescence of Er-doped Silicon-rich Silicon Oxide Films
Author :
Flynn, M. ; Zalloum, O.H.Y. ; Wojcik, J. ; Calder, I. ; Gujrathi, S. ; Hill, S. ; Mascher, P.
Author_Institution :
Dept. of Eng. Phys., McMaster Univ., Hamilton, Ont.
Abstract :
Silicon-rich silicon oxide films have been doped using an organometallic erbium precursor. Carbon contamination in the films is shown to have a pronounced effect on the visible photoluminescence. The doping also impacts formation of nanocrystals within the films
Keywords :
erbium; nanostructured materials; photoluminescence; plasma CVD; silicon compounds; thin films; ECR-PECVD; Er-doped silicon-rich silicon oxide films; SiO:Er; carbon contamination; electron cyclotron resonance plasma enhanced chemical vapour deposition; nanocrystals; organometallic erbium precursor; rare-earth precursor impact; visible photoluminescence; Carbon dioxide; Doping; Electrons; Erbium; Luminescence; Photoluminescence; Plasma temperature; Semiconductor films; Silicon; Sputtering;
Conference_Titel :
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
1-4244-0096-1
DOI :
10.1109/GROUP4.2006.1708160
