DocumentCode :
2661402
Title :
Numerical simulation of advanced RF plasma sources
Author :
Montalvo ; Carrera ; Lebrun, M. ; Pekker, L. ; Godyak, V.
Author_Institution :
Valley research Corporation
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
151
Lastpage :
151
Keywords :
Equations; Numerical simulation; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Plasma waves; Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.697934
Filename :
697934
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2661402
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