• DocumentCode
    2661402
  • Title

    Numerical simulation of advanced RF plasma sources

  • Author

    Montalvo ; Carrera ; Lebrun, M. ; Pekker, L. ; Godyak, V.

  • Author_Institution
    Valley research Corporation
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    151
  • Lastpage
    151
  • Keywords
    Equations; Numerical simulation; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Plasma waves; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697934
  • Filename
    697934
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2661402