DocumentCode

2661412

Title

Ion kinetics in a low pressure RF Sheath

Author

Skorik, M.A. ; Allen, Jonathan E.

Author_Institution

Oxford OKI

fYear

1993

fDate

1-3 June 1993

Firstpage

151

Lastpage

152

Keywords

Anodes; Distribution functions; Electrons; Equations; Kinetic theory; Plasma measurements; Plasma sources; Plasma temperature; Radio frequency; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on

Conference_Location

Tampa, FL, USA

Print_ISBN

0-7803-0716-X

Type

conf

DOI

10.1109/PLASMA.1992.697935

Filename

697935