DocumentCode
2661664
Title
Native defect compensation in III-antimonide bulk substrates
Author
Pino, Robinson ; Ko, Youngok ; Dutta, Partha S.
Author_Institution
Dept. of Electr., Comput. & Syst. Eng., Rensselaer Polytech. Inst., Troy, NY, USA
fYear
2004
fDate
4-6 Aug. 2004
Firstpage
34
Lastpage
39
Abstract
As-grown, undoped III-antimonide bulk substrates contain high concentration of native defects resulting in high residual carrier density. In this paper, we have demonstrated that native defects can be compensated in bulk substrates of GaSb, InSb, and Ga1-xInxSb via impurity doping and low temperature growth from nonstoichiometric melts and solutions. Decrease in residual carrier concentration up to one order of magnitude at 300 K and three orders of magnitude at 77 K have been achieved.
Keywords
III-V semiconductors; crystal defects; crystal growth from melt; crystal growth from solution; gallium compounds; indium compounds; semiconductor doping; 300 K; 77 K; GaSb; InSb; as-grown bulk substrates; high residual carrier density; low temperature growth; native defect compensation; nonstoichiometric melts; nonstoichiometric solutions; residual carrier concentration; undoped III-antimonide bulk substrates; via impurity doping; Crystals; Gallium compounds; High speed optical techniques; III-V semiconductor materials; Optical devices; Photonic band gap; Substrates; Systems engineering and theory; Tellurium; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
High Performance Devices, 2004. Proceedings. IEEE Lester Eastman Conference on
Print_ISBN
981-256-196-X
Type
conf
DOI
10.1109/LECHPD.2004.1549668
Filename
1549668
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