• DocumentCode
    2661731
  • Title

    Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides

  • Author

    Schrauwen, J. ; Van Thourhout, D. ; Baets, R.

  • Author_Institution
    Dept. of Inf. Technol., Ghent Univ.
  • fYear
    2006
  • fDate
    13-15 Sept. 2006
  • Firstpage
    101
  • Lastpage
    103
  • Abstract
    We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques
  • Keywords
    diffraction gratings; focused ion beam technology; masks; optical fibre couplers; optical fibre fabrication; silicon-on-insulator; sputter etching; Si-SiO2; focused-ion-beam techniques; grating couplers; hard mask; selective etchant; silicon-on-insulator waveguides; vertical fiber couplers fabrication; Etching; Fiber gratings; Optical attenuators; Optical device fabrication; Optical fiber couplers; Optical fiber devices; Optical losses; Optical waveguides; Photonics; Silicon on insulator technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2006. 3rd IEEE International Conference on
  • Conference_Location
    Ottawa, Ont.
  • Print_ISBN
    1-4244-0096-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2006.1708179
  • Filename
    1708179
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2661731