Title :
Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides
Author :
Schrauwen, J. ; Van Thourhout, D. ; Baets, R.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ.
Abstract :
We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques
Keywords :
diffraction gratings; focused ion beam technology; masks; optical fibre couplers; optical fibre fabrication; silicon-on-insulator; sputter etching; Si-SiO2; focused-ion-beam techniques; grating couplers; hard mask; selective etchant; silicon-on-insulator waveguides; vertical fiber couplers fabrication; Etching; Fiber gratings; Optical attenuators; Optical device fabrication; Optical fiber couplers; Optical fiber devices; Optical losses; Optical waveguides; Photonics; Silicon on insulator technology;
Conference_Titel :
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
1-4244-0096-1
DOI :
10.1109/GROUP4.2006.1708179
