Title :
Minor magnesium doping in P-type layer of InGaN/GaN MQW LED to enhance electrical and optical properties
Author :
Shih, Meng-Fu ; Lin, Yung-Hsiang ; Liao, Chun-Wei ; Yen, Cheng-Ying ; Chou, Yi-Lun ; Lin, Ray-Ming
Author_Institution :
Chang Gung Univ., Taoyuan
Abstract :
In this study, the LED samples were grown by metalorganic chemical vapor deposition (MOCVD) on 430 mum-thick c-plan sapphire substrates. The layer sequence consisted of a 25.0 nm GaN nucleation layer followed by a 2.0 mum-thick undoped GaN buffer layer, a 2.0 mum-thick Si-doped GaN conduction layer, a active region composed of five 2.5 nm-thick In0.23Ga0.77N QWs separated by 12.0 nm-thick GaN barriers, followed by 15 pairs of Mg-doped AlGaN/GaN superlattice structure consisting of 3.0 nm AlGaN layers, and 3.0 nm GaN layers, a 30.0 nm-thick Mg-doped GaN cap layer. Finally, a 10.0 nm Mg-doped GaN contact layer was grown on the top of LED.
Keywords :
III-V semiconductors; aluminium compounds; chemical vapour deposition; gallium compounds; light emitting diodes; magnesium; nucleation; sapphire; semiconductor doping; semiconductor quantum wells; InGaN-GaN; MOCVD; MQW LED; Mg; P-type layer; electrical properties; magnesium doping; metalorganic chemical vapor deposition; nucleation layer; optical properties; sapphire substrates; size 10 nm; size 12 nm; size 2 mum; size 2.5 nm; size 25 nm; size 3 nm; size 30 nm; size 430 mum; Aluminum gallium nitride; Chemical vapor deposition; Doping; Gallium nitride; Light emitting diodes; MOCVD; Magnesium; Optical buffering; Optical superlattices; Quantum well devices;
Conference_Titel :
Semiconductor Device Research Symposium, 2007 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-1892-3
Electronic_ISBN :
978-1-4244-1892-3
DOI :
10.1109/ISDRS.2007.4422553