Title :
Out-of-Plane Total Internal Reflection Coupling Mirrors in Silicon-on-Insulator Ridge Waveguides
Author :
Cheben, P. ; Lamontagne, B. ; Post, E. ; Janz, S. ; Xu, D.-X. ; Delage, A.
Author_Institution :
Inst. for Microstruct. Sci., Nat. Res. Council of Canada, Ottawa, Ont.
Abstract :
We describe the fabrication and performance of out-of-plane coupling mirrors in silicon-on-insulator (SOI) ridge waveguides. The mirrors consisted of a 45deg facet formed using directional CAIBE etching through a lithographically defined window
Keywords :
mirrors; optical couplers; optical fabrication; optical waveguides; ridge waveguides; silicon-on-insulator; sputter etching; SOI ridge waveguides; Si-SiO2; directional CAIBE etching; lithographically defined window; mirror fabrication; out-of-plane coupling mirrors; silicon-on-insulator ridge waveguides; total internal reflection mirrors; Arrayed waveguide gratings; Couplers; Etching; Mirrors; Optical waveguides; Packaging; Reflection; Sensor arrays; Silicon on insulator technology; Surface waves;
Conference_Titel :
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location :
Ottawa, Ont.
Print_ISBN :
1-4244-0096-1
DOI :
10.1109/GROUP4.2006.1708194
